• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:

    公开号:SE1150429A1
    申请号:SE1150429
    申请日:2011-05-12
    公开日:2012-11-13
    发明作者:Edvard Kaelvesten
    申请人:Silex Microsystems Ab；
    IPC主号:
    专利说明:

    Further application of the invention will be apparent from the detailed description below and the accompanying drawings which are given for illustrative purposes only, and thus are not to be construed as limiting the invention, and in which Fig. 1 schematically illustrates a prior art device. ; Figs. 2a-d are a manufacturing diagram of a device according to the invention.
    Detailed Description of Preferred Embodiments For the purposes of this patent application, the term "perfectly planar" whenever used is considered to mean a surface roughness <Snm, preferably <2 nm.
    A native disc of an optically transparent material after polishing, and as supplied by most manufacturers, is to be considered as a "perfect plan" for the purposes of this invention.
    Fig. 1 schematically illustrates a known micro-display device, generally indicated by the reference numeral 10.
    It comprises a bottom substrate 12 on which a top substrate 14 is bonded by suitable means known to those skilled in the art.
    In the top substrate 14, grooves have been taken up by, for example, drilling, etching or some other physical machining process, five grooves being shown. These grooves form channels 16 when the top and bottom substrates are bonded together as shown.
    The side walls 17 of the channels are substantially vertical and the top surface 18 is substantially horizontal (when the device is oriented as shown in the figure).
    In order to enable the supply of liquid reagents and analytes to the channels, there is preferably provided an inlet 15a, and there are also outlets 15b for allowing liquid to be removed from the channels.
    However, the surface structure of the top surface 18 is not perfect, since the physical processes used to make the grooves forming the channels 16 will dig out of material in a relatively coarse manner. This is schematically illustrated by showing a region at the top surface 18 in the channels 16 which has a dotted structure. The region shown is not to scale, it is intended for illustrative purposes only and is intended to indicate that the surface is not perfectly flat. In particular, the surface roughness in this region will far exceed the criterion for flatness herein, i.e. the surface roughness is >> 5 nm, typically 10-1000 nm.
    In accordance with the present invention, a device of the type shown in Fig. 1 can be manufactured so as to have perfectly flat or almost perfectly flat top surfaces in the channel, i.e. a surface roughness <5 nm, preferably <2 nm, and a method for to manufacture such a device will now be described with reference to Figures 2a-d.
    Thus, as shown in Fig. 2a, a bottom substrate 20 and a top substrate 22. both are made of an optically transparent material such as glass. Suitable glass materials are low-ion glass or ion-free glass. Furthermore, both substrates have a surface roughness <5 nm, preferably <2 nm, at least on the surfaces which will form the inner surfaces of the channels in the finished device, i.e. the top surface TS of the substrate 20 and the bottom surface BS on the substrate 22.
    In the top substrate 22 a number (four shown) grooves or recesses 24 are made, for example by drilling or etching or similar method. The top and bottom substrates 20, 22 are bonded together by bringing together pre-prepared extremely clean and flat surfaces into contact (van der Waals bond) and then applying heat (indicated by arrows), optionally by applying pressure, as shown in Figs. 2b. After bonding, the structure will be substantially the same as the structure according to the prior art in Fig. 1, i.e. with channels having "raw" top surfaces 25.
    Other methods that can be mentioned are laser ablation and anodic glass-glass bonding.
    Of course, any other suitable methods known to those skilled in the art may also be used.
    When the substrates are bonded together, the top substrate 22 is subjected to a machining process to remove material so that the channels are exposed.
    The processing can be done by etching grinding, polishing or some other learning method that would give the same result.
    After the machining step, the structure shown in Fig. 2c is obtained, i.e. a bottom substrate 20 on which a top substrate 22 is applied, and in which there are a number of open channels 28 arranged.
    Then, as shown in Fig. 2d, a third substrate 29, referred to herein as cover 29, is bonded to the combined structure of Fig. 2c, thereby obtaining a microdialistic device according to the invention, generally designated 30. The third substrate 29 is also made of glass and has perfectly flat (as defined herein) opposite surfaces 3 1, 32. In this way, the top surface 33t of the channels 28 will be perfectly flat, and useful in many applications which have not heretofore been possible with previously known devices. Suitably the surface roughness of the top surface 33t in each channel is <5 nm, preferably <2 nm. Thus, the device 30 comprises a body of glass built up of three substrates 20, 22, 29 within which a set of channels 28 extends.
    The bottom surface 33b inside the channels 28 will also be perfectly flat, i.e. have a surface roughness <5 nm, preferably <2 nm thanks to the fact that the bottom substrate 20 had such a surface roughness from the beginning.
    In order to enable liquid reagents and analytes to be supplied to the channels, inlets 34 are preferably provided, and outlets 35 are also provided to allow liquid to be removed from the channels. Fig. 2d shows how the inlet 34 opens into the left channel 28 ', and the outlet 35, which is shown in dotted line to indicate that it is located at the far end of the device (below the plane of the clock), provides an exit from the right channel 28 ”.
    All channels can thus be connected to form a channel system with an inlet and an outlet. Of course, there could be a number of inlets and outlets for individual channels or for your channel systems, the embodiment shown is only a very simple exemplary embodiment.
    These inlets and outlets can be made by etching and / or drilling holes 34 in the lid 29 to provide access to the channels 28.
    权利要求:
    Claims (6)
    [1]
    A method of manufacturing a micro-optical device, comprising the steps of: providing an optically transparent bottom substrate (20) made of glass; providing an optically transparent top substrate (22) made of glass; making grooves (24) in the top substrate; bonding the top (22) and bottom substrates (20) together; removing material from the top substrate (22) to expose the grooves (24); applying a lid (29) made of glass to the top substrate (229 to cover the grooves (24) to form channels (28), at least the surface of the lid and the surface of the bottom substrate facing the channels (24) in the top substrate (22); ) has a surface roughness of <Snm, preferably <2 nm.
    [2]
    The method of claim 1, further comprising making inlets and outlets to and from the channels (28).
    [3]
    A method according to claim 1 or 2, wherein the bonding of the substrates is accomplished by bringing together prepared extremely clean and flat surfaces and then applying heat and optional pressure.
    [4]
    A method according to any one of the preceding claims, wherein the glass is selected from glass with low ion content or ion-free glass.
    [5]
    A micro-optical device (30) comprising a body (20, 22, 29) made of glass, and at least one channel (28) extending inside the body, which channel (s) has a bottom surface (33b), a top surface (33t) and side walls, characterized in that the top and bottom surfaces (33t, 33b) both have a surface roughness of <Snm, preferably <2 nm.
    [6]
    Device according to claim 5, wherein at least one inlet (34) and an outlet (35) are arranged to and from the channels (282 28 ").
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    同族专利:
    公开号 | 公开日
    US20120288422A1|2012-11-15|
    SE536058C2|2013-04-16|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US5498392A|1992-05-01|1996-03-12|Trustees Of The University Of Pennsylvania|Mesoscale polynucleotide amplification device and method|CN107305214B|2016-04-22|2019-01-04|清华大学|A kind of production method of hard micro-fluid chip|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    SE1150429A|SE536058C2|2011-05-12|2011-05-12|Method of manufacturing a glass microfluidic device and a glass microfluidic device|SE1150429A| SE536058C2|2011-05-12|2011-05-12|Method of manufacturing a glass microfluidic device and a glass microfluidic device|
    US13/469,377| US20120288422A1|2011-05-12|2012-05-11|Glass micro fluidic device|
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